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Thesis by Tirrito, Matteo

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Thesis

[img] Matteo Tirrito. Characterization of Highly Doped Si:P, Si:As and Si:P:As Epi Layers for Source/Drain Epitaxy. Rel. Gianluca Piccinini. Politecnico di Torino, Corso di laurea magistrale in Ingegneria Elettronica (Electronic Engineering), 2020

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