Nowadays, microchips and semiconductors that belongs to the daily routine are becoming smaller and faster to adapt to the increasing requirements. To produce semiconductors, multiple steps in a vacuum chamber are necessary, therefore in order to accelerate the processes and saving time, the vacuum valves necessitate to be as quick though precise as possible. This means, that the requirements for motion control are increasing, e.g. in term of faster movements, faster settling times and more precise position control. The aim of this dissertation is to simulate, tune and test different control algorithms to meet the semiconductors industries demands. However, a good control algorithms is not only the essential part to achieve excellent performance, but also a trajectory planner is crucial.