From FinFET to Nanosheet Si-SiGe GAAFET: fabrication process simulation and analysis
Matteo Pelosi
From FinFET to Nanosheet Si-SiGe GAAFET: fabrication process simulation and analysis.
Rel. Gianluca Piccinini, Marco Vacca. Politecnico di Torino, Corso di laurea magistrale in Ingegneria Elettronica (Electronic Engineering), 2021
