Gilberto Brugiafreddo
Vibration control system on the test unit Shaker for testing and calibration of High-G MEMS.
Rel. Marcello Chiaberge. Politecnico di Torino, Corso di laurea magistrale in Mechatronic Engineering (Ingegneria Meccatronica), 2020
Abstract
The great technological evolution on the MEMS field, with the growth of their complexity into a smaller dimensions, comes alongside the development of more sophisticated and precise testing and calibration techniques to ensure the functionalities of these devices. Reliability of the MEMS devices is now-days essential in all the engineering fields, from automotive to aeronautical, space and medical one. SPEA is an Italian industry world leader in testing and calibration of MEMS devices. SPEA has developed an automatic machine, called Shaker, able to test and calibrate high-g MEMS accelerometers through three-axes simultaneous excitation tests characterized by the generation of sinusoidal acceleration stimuli at high amplitudes and high frequencies.
An important feature of the Shaker is its ability to produce a precise and clean sinusoidal stimulus using four linear three-phase induction motors
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