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Fabrication and electrical characterization of ferroelectric Si-doped HfO2 thin films for cryo-electronic memory devices

Dario Ricci

Fabrication and electrical characterization of ferroelectric Si-doped HfO2 thin films for cryo-electronic memory devices.

Rel. Matteo Cocuzza, Mihai Adrian Ionescu, Niccolo' Martinolli. Politecnico di Torino, Master of science program in Nanotechnologies For Icts, 2025