Biosensors have been developed since decades and for a wide range of applications, such as diagnostics, monitoring of diseases, drug discovery and food industry. One key demand for all the different fields is the highly specific detection of biomolecules. Various biosensing strategies have been investigated to obtain more sensitive and specific biological sensors. So far, the most interesting results in terms of low detection limit have been achieved with bottom-up fabricated biosensors. A bottom-up approach allows for more easy and economical fabrication of sensors for proof-of-concept studies compared to the photolithographic process which relies on a cleanroom. However, a top-down photolithographic approach remains the only choice to realize high-volume biosensor chips for high-throughput applications with good yield and reliability.