Vibration sensors, also known as vibrometers, are essential components for maintaining the safety and reliability of various machines, such as aircraft engines. Vibrometers are capable of detecting very small vibrations, which can be caused by acceleration or pressure variations in the environment. However, the strict requirements for safety, resolution, endurance, and lifetime in the aerospace industry have caused the technology to evolve slowly. Indeed in this sector sensors have to work in harsh environments and at the same time high performances are required. MEMS-technologies based accelerometers were introduce to fulfill these requirements by substituting the old bulk technology: they are smaller, more responsive, more robust.