Marco D'Alessandro
Lateral Conversion TMD synthesis: investigating sub-20 nm features, Material Quality and Optical Device Design.
Rel. Fabrizio Giorgis. Politecnico di Torino, Corso di laurea magistrale in Nanotechnologies For Icts (Nanotecnologie Per Le Ict), 2023
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Abstract
The research presented in this master’s thesis delves into the synthesis and characterization of transition metal dichalcogenides (TMDs), with a particular emphasis on WS2, renowned for its exceptional properties among TMDs. The primary objective of this study was to investigate the reduction of TMD features down to 20 nm utilizing a bottom-up lithographic approach employing block copolymers to create the desired features and a lateral conversion growth mechanism to convert a uniformly deposited metal oxide layer to the desired TMD. To analyze the resulting material, a transfer method onto TEM grids was developed. Scanning transmission electron microscopy (STEM) and Raman spectroscopy were used for initial TMD characterization and to optimize the transfer technique.
Further microstructural analysis was made possible using high-resolution transmission electron microscopy (HRTEM)
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