Due to their high power density, rapid charge and discharge capabilities, and long lifetime, Micro-Supercapacitors (μSC) have garnered significant interest for their possible utilization for energy harvesting in micro and integrated electronics. The effort in this work lies in the optimization of materials and in manufacturing processes of their electrodes rather than in their integration methods with other micro devices to obtain more smart and complex systems. The interfacial properties of thin film Transition Metal Oxides (TMOs) will be studied for this aim. Their high surface area and easy deposition technique (electroplating) make them an excellent candidate as a cathode and anode for μSC.