Optimization of NS-GAAFET technology through low-κ dielectrics for spacer fabrication
Antonio Colonna
Optimization of NS-GAAFET technology through low-κ dielectrics for spacer fabrication.
Rel. Gianluca Piccinini, Fabrizio Mo, Chiara Elfi Spano. Politecnico di Torino, Corso di laurea magistrale in Ingegneria Elettronica (Electronic Engineering), 2023
