Franco De Palma
Single Electron Transistor on FD SOI for Spin Qubits Sensing.
Rel. Gianluca Piccinini. Politecnico di Torino, Corso di laurea magistrale in Nanotechnologies For Icts (Nanotecnologie Per Le Ict), 2021
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Abstract
This Master Thesis describes the design and the fabrication of a Single Electron Transistor (SET) on a FD SOI (Fully Depleted Silicon-on-Insulator) substrate. The SET is an ultra-sensitive sensor capable of measuring single charge transitions in the environment, which makes it the best candidate for the readout of a spin qubit state. Moreover, the SET illustrated in this Thesis is based on the silicon quantum dots technology and this aspect makes easier its integration with spin qubits. Such platforms already exist and will be introduced during the dissertation, but most of them are fabricated on bulk silicon and not on SOI.
Under this light, the aim of this work is to validate a robust process flow to fabricate a quantum dot on FD SOI wafers with the function of SET, the leading device for the integration of more complicated devices such as spin qubits in silicon quantum dots
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