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Analytical, numerical and experimental analysis of micro-cantilevers

Antonio Montanarella

Analytical, numerical and experimental analysis of micro-cantilevers.

Rel. Alessandro Fasana, Fabrizio Scarpa. Politecnico di Torino, Corso di laurea magistrale in Ingegneria Meccanica, 2018

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This thesis conducts a study on vibrations of micro cantilevers in T-shape produced for Micro Electro-Mechanical System (MEMS). The study was conducted in a project of six months (March 2017 – August 2017) in University of Bristol in United Kingdom, in a collaboration between Departments of Mechanical engineering and Electronic engineering. It was ultimated in the last year in Politecnico of Turin.The micro cantilever beam were analyzed in multilayer configurations composed by 2 or 3 layers, made by Gallium Nitrate, Aluminum Nitrate and Silicon substrate. After realizations of these micro cantilever beam, they has been analyzed with a Laser Doppler Vibrometer (LDV) in Griffith University in Australia to obtain the first natural frequency. After checking the coherence of results through a Finite Element Model (FEM), the goal of this thesis was to obtain a mathematical model that calculates, as well as possible with a single formula, the first natural frequency.

Relators: Alessandro Fasana, Fabrizio Scarpa
Academic year: 2017/18
Publication type: Electronic
Number of Pages: 88
Corso di laurea: Corso di laurea magistrale in Ingegneria Meccanica
Classe di laurea: New organization > Master science > LM-33 - MECHANICAL ENGINEERING
Aziende collaboratrici: UNSPECIFIED
URI: http://webthesis.biblio.polito.it/id/eprint/8137
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