Vincenzo Della Donna
Fabrication of a Coriolis effect based MEMS sensor for metrology applications.
Rel. Giancarlo Cicero, Simone Luigi Marasso, Giuseppe Cavuoto, Diego Pugliese. Politecnico di Torino, Corso di laurea magistrale in Ingegneria Dei Materiali Per L'Industria 4.0, 2026
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Abstract
This work presents the modeling, microfabrication, and experimental characterization of a micro-Coriolis mass flow sensor fabricated entirely from SU-8 100. The device utilizes the Coriolis effect to obtain a direct measurement of mass flow rate that is independent of the fluid’s physical properties, such as density and viscosity. The choice of the SU-8 epoxy photoresist was driven by its biocompatibility, as well as its mechanical properties, such as mechanical and thermal stability, which make it ideal for integration into Micro Electro-Mechanical Systems (MEMS) intended for biomedical and industrial applications. The fabrication process evolved from the use of traditional UV photolithography to Direct Write Lithography (DWL) to enable rapid and flexible prototyping for MEMS architectures.
The device structure was fabricated using a multi-layer process involving the separate fabrication of microfluidic bases and covers through optimized steps of spin coating, soft bake, laser exposure, and post-exposure bake (PEB)
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