Fabrication of highly scalable Non Volatile Memory The advancement in modern electronics has created a growing need for fast, reliable and energy efficient memory technologies. Traditional memory technologies like DRAM and Flash memory are facing challenges in terms of durability, efficiency and scalability as technology continues to shrink. This thesis provides a comprehensive literature review on emerging nonvolatile memories that are highly scalable and energy efficient with a particular focus on technologies like Fe-FET, GAAFET based NVM and ReRAM. The review starts by addressing the current scenario of the nonvolatile technology ad dressing its limitation followed by the importance of nonvolatile with a emphasize on scaling to sustain Moore’s law.