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3D Silicon-based Tunnel FET technology: fabrication process and electrical TCAD simulations

Enrico Monfrino, Roberto Poma

3D Silicon-based Tunnel FET technology: fabrication process and electrical TCAD simulations.

Rel. Gianluca Piccinini, Fabrizio Mo, Chiara Elfi Spano. Politecnico di Torino, Master of science program in Nanotechnologies For Icts, 2023