3D Silicon-based Tunnel FET technology: fabrication process and electrical TCAD simulations
Enrico Monfrino, Roberto Poma
3D Silicon-based Tunnel FET technology: fabrication process and electrical TCAD simulations.
Rel. Gianluca Piccinini, Fabrizio Mo, Chiara Elfi Spano. Politecnico di Torino, Master of science program in Nanotechnologies For Icts, 2023
