Vertical Junctionless Nano Transistor TCAD modeling and performance evaluation
Alessandro Bugliarelli
Vertical Junctionless Nano Transistor TCAD modeling and performance evaluation.
Rel. Mariagrazia Graziano, Gianluca Piccinini, Fabrizio Mo, Yuri Ardesi. Politecnico di Torino, Master of science program in Nanotechnologies For Icts, 2023
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Abstract
This work presents a TCAD (Technology Computer-Aided Design) calibration procedure specifically tailored for a vertical nanowire Gate-All-Around junctionless transistor developed at the LAAS-CNRS research facility in Toulouse. The junctionless transistor is an emerging device architecture that offers potential advantages over traditional junction-based transistors in terms of process simplicity, reduced fabrication cost, and improved performance characteristics. However, accurately modeling and simulating junctionless transistors using TCAD tools require a careful calibration process due to the unique device physics and material properties involved. The proposed calibration procedure aims to optimize the TCAD model parameters to accurately represent the electrical behavior of junctionless transistors. It involves a systematic methodology that combines experimental data and simulation results to iteratively refine the model parameters.
The calibration process takes into account various key factors, including the device geometry, material properties and interface effects, to ensure a comprehensive and accurate representation of the device behavior
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