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Optimization of NS-GAAFET technology through low-κ dielectrics for spacer fabrication

Antonio Colonna

Optimization of NS-GAAFET technology through low-κ dielectrics for spacer fabrication.

Rel. Gianluca Piccinini, Fabrizio Mo, Chiara Elfi Spano. Politecnico di Torino, Master of science program in Electronic Engineering, 2023