Recently, a new and promising scanning probe microscopy (SPM) configuration called reverse tip sample (RTS) SPM has been developed at IMEC to overcome the main limitations of the classical SPM approach. In RTS SPM, the classical position of tip and sample is switched: the tip is placed on the stage (where normally the sample is located) and the sample is placed at the cantilever end (where the tip is commonly located). The major advantage of this novel approach is the possibility to substitute a single tip with a chip containing hundreds to thousands of tips. Further advantages of this promising method are: rapid and seamless tip switching within seconds (typically 10 min in the classical configuration), the potential to combine different measurement techniques requiring each a different tip and measure quasi simultaneously with different tips for improved data statistics.