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Sc-doped AlN: high performance piezoelectric MEMS resonators and high-polarization ferroelectric

Gabriel Giribaldi

Sc-doped AlN: high performance piezoelectric MEMS resonators and high-polarization ferroelectric.

Rel. Matteo Cocuzza, Stefano Stassi. Politecnico di Torino, Master of science program in Nanotechnologies For Icts, 2020