Analytical, numerical and experimental analysis of micro-cantilevers

This thesis conducts a study on vibrations of micro cantilevers in T-shape produced for Micro Electro-Mechanical System (MEMS). The study was conducted in a project of six months (March 2017 – August 2017) in University of Bristol in United Kingdom, in a collaboration between Departments of Mechanical engineering and Electronic engineering. It was ultimated in the last year in Politecnico of Turin.The micro cantilever beam were analyzed in multilayer configurations composed by 2 or 3 layers, made by Gallium Nitrate, Aluminum Nitrate and Silicon substrate. After realizations of these micro cantilever beam, they has been analyzed with a Laser Doppler Vibrometer (LDV) in Griffith University in Australia to obtain the first natural frequency. After checking the coherence of results through a Finite Element Model (FEM), the goal of this thesis was to obtain a mathematical model that calculates, as well as possible with a single formula, the first natural frequency.