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Thesis by Dibenedetto, Marco

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Thesis

Marco Dibenedetto. Optimization of MOF film deposition process and oxide ยต-patterning via Atmospheric Pressure SALD/SMLD. Rel. Barbara Onida, David Munoz-Rojas. Politecnico di Torino, Corso di laurea magistrale in Ingegneria Dei Materiali, 2022

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