The semiconductor industry continues to push the boundaries of microchip miniaturization, while also requiring high yield and throughput. ASML is a leading company that drives this advancement, thanks to its lithography and metrology systems, which enable the progression of Moore's Law by overcoming the technology nodes. This thesis project has been carried out at ASML with the goal of characterizing a Micro Electro Mechanical System (MEMS)-based Fast Steering Mirror (FSM) and prototyping a a precise beam control system for optical applications. MEMS-based FSM devices are commonly used in optical communications, LiDAR sensing, adaptive optics and beam alignment. They have advantages over other beam steering technologies including improved bandwidth and reduced size and cost.