Polarimetric imaging for void detection in Silicon wafers
Anahit Hambardzumyan
Polarimetric imaging for void detection in Silicon wafers.
Rel. Carlo Ricciardi. Politecnico di Torino, Master of science program in Nanotechnologies For Icts, 2025
|
Preview |
PDF (Tesi_di_laurea)
- Thesis
Licence: Creative Commons Attribution Non-commercial No Derivatives. Download (8MB) | Preview |
Abstract
Polarimetric Imaging for Advanced Semiconductor Inspection
Publication type
URI
 |
Modify record (reserved for operators) |
