Younes Mounib
Study of ferroelectric based varactors for RF applications.
Rel. Carlo Ricciardi, Liliana Prejbeanu. Politecnico di Torino, Master of science program in Nanotechnologies For Icts, 2025
Abstract
This internship was carried out at Thales Research & Technology and focused on the fabrication and electrical characterization of ferroelectric varactors for radio-frequency (RF) applications. The varactors were based on a metal–ferroelectric–metal (MFeM) structure using Al-doped HfO₂ as the ferroelectric layer, deposited by Atomic Layer Deposition (ALD). Two different thicknesses were studied to com-pare their dielectric and tunable properties. The first part of the internship took place in the cleanroom, where I participated in the fabrication of the devices. I learned to perform photolithography, and carry out metal deposition and etching steps. After fabrication, I used different electrical setups to characterize the varactors.
Low-frequency measurements confirmed the ferroelectric behavior of the capacitors and showed how electrical cycling can improve their performance
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