The advancement of superconducting quantum computing technologies increasingly relies on the availability of low-loss, wide-bandwidth microwave amplifiers and non-reciprocal components such as isolators and circulators. This thesis addresses two principal challenges in this context: the optimization of superconducting nitride films through advanced deposition techniques and the realization of magnet-free non-reciprocal devices based on parametric modulation. On the materials side, the main focus is on ultrathin niobium nitride (NbN) and niobium titanium nitride (NbTiN) films, whose superconducting properties are strongly influenced by stoichiometry, disorder, and microstructure. High Power Impulse Magnetron Sputtering (HiPIMS), an advanced deposition technology, is employed to systematically investigate and optimize process parameters for NbN and NbTiN, with the goal of surpassing conventional DCMS methods.