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Process defectivity: investigation and optimization of the process control for the 12 µm bolometer technology

Ewan Gauchet

Process defectivity: investigation and optimization of the process control for the 12 µm bolometer technology.

Rel. Carlo Ricciardi. Politecnico di Torino, Corso di laurea magistrale in Nanotechnologies For Icts (Nanotecnologie Per Le Ict), 2024