Technological advancements continuously require systems that feature higher levels of miniaturization and functional integration, from consumer electronics to medical and industrial fields. Moreover, the growing focus on sustainability more than ever demands devices that not only perform well but are also increasingly energy-efficient. At the component level, MEMS (micro-electromechanical systems) represent a particularly advantageous solution. These microsystems include structural parts that can be analyzed similarly to their macroscopic counterparts, with additional challenges related to their micrometer scales and the coupling between different physical domains. Among all the applications for these devices, they have become very popular in the field of reference oscillators.