The current research focuses on examining the effect of Scandium (Sc) doping on Aluminum Nitride (AlN) thin films with respect to the performance of MEMS piezoelectric resonators. The primary objective of this work is to analyze the impact of Scandium doping on the structural, morphological, and piezoelectric characteristics of thin films. Additionally, the research project aims to assess the effectiveness of these films in applications involving BAW resonators. The present study is structured into three five chapters. The initial chapter serves as an introductory section for the thesis, providing an overview of the current advancements in the field of MEMS resonators.