Lucia Crocetto
Development of hybrid suspended microchannel resonators for mass sensing in liquid.
Rel. Carlo Ricciardi. Politecnico di Torino, Master of science program in Nanotechnologies For Icts, 2023
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Abstract
Suspended microchannel resonators have proved to be the best candidates for a variety of technological applications requiring accurate measurements in liquid. These devices eliminate the viscous damping by placing the solution inside a hollow resonator surrounded by vacuum, thus reaching sub-femtogram resolution. The main fabrication method of suspended microchannel resonators is standard cleanroom fabrication, which allows to create resonators with excellent mass sensitivity. However, fabrication steps are expensive and complex, and inherently planar, thus limiting three-dimensional design. In this scenario, polymeric resonators printed by two-photon polymerization(TPP) emerged as a valid solution to increase the low prototyping speed and accessibility of silicon-based resonators, but low quality factor and mass sensitivity limit their performance.
In this work, a novel fabrication technique based on a hybrid structure has been developed
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