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Optimization of NbTiN thin film sputtering and optical lithography for large area superconducting nanowire single photon detectors

Marco Zagarella

Optimization of NbTiN thin film sputtering and optical lithography for large area superconducting nanowire single photon detectors.

Rel. Renato Gonnelli. Politecnico di Torino, Master of science program in Nanotechnologies For Icts, 2023