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Design, fabrication and measurement of superconducting resonating circuits for the characterisation of atomic-layer deposited aluminium nitride thin films in the few gigahertz frequencies at millikelvins temperatures

Armel, Alphonse Cotten

Design, fabrication and measurement of superconducting resonating circuits for the characterisation of atomic-layer deposited aluminium nitride thin films in the few gigahertz frequencies at millikelvins temperatures.

Rel. Carlo Ricciardi. Politecnico di Torino, Master of science program in Nanotechnologies For Icts, 2023