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Design, fabrication and measurement of superconducting resonating circuits for the characterisation of atomic-layer deposited aluminium nitride thin films in the few gigahertz frequencies at millikelvins temperatures

Armel, Alphonse Cotten

Design, fabrication and measurement of superconducting resonating circuits for the characterisation of atomic-layer deposited aluminium nitride thin films in the few gigahertz frequencies at millikelvins temperatures.

Rel. Carlo Ricciardi. Politecnico di Torino, Corso di laurea magistrale in Nanotechnologies For Icts (Nanotecnologie Per Le Ict), 2023