The relevance of portable electronic devices has increased constantly in the lasts years leading to a growing interest in more efficient portable power sources. Among the proposed solutions, micro-solid oxide fuel cell power generators (µ-SOFC PG) are one of the most interesting alternatives to traditional Li batteries, due to their superior energy and power density, long lifetime and high reliability. µ-SOFC shares the same working principles of traditional SOFC, but the entire cell is based on thin films, drastically reducing the ohmic losses and allowing to operate at temperatures below 600 °C. Moreover, the system is integrated in Si technology, offering the possibility of using mainstream fabrication processes of Micro Electro-Mechanical Systems (MEMS) and, therefore, assuring low cost and a facile scale up to large scale production.