Development and Testing of Measurement Setups for Ultrasound Characterization of CMUT Devices

Capacitive Micromachined Ultrasound Transducers (CMUTs) are MEMS-based devices designed for both transmitting and receiving signals, finding applications in fields such as medical imaging, microscopy, inkjet printing, and testing. Recent advancements in manufacturing processes are enabling large-scale production, providing great design flexibility and high levels of integration, thus driving significant innovations in the field of ultrasound transducers. As CMUTs require a DC bias to reach the collapse mode, where they produce maximum acoustic pressure, and an RF voltage to induce vibration, the most advanced designs aim to reduce the operating voltages without compromising device functionality. For this reason, understanding how to test these devices and evaluate their performance is essential. In this project, measurements in transmit mode, receive mode, and pulse-echo configuration will be explored, along with numerical models to facilitate future simulations of their behavior. Complex designs aimed at real-time three-dimensional imaging will also be investigated, providing valuable insights into their current state-of-the-art and the next necessary steps for development.