Study of surface energy for contact mechanics applications. The case of a Hydrogenated Diamond-like Carbon coating = Study of the surface energy of a diamond like carbon coating for contact mechanics applications

This thesis activity was performed by the candidate at ASML Netherlands B.V. in Veldhoven, the Netherlands. ASML is the world leader supplier of photolithography machines used in the production of computer chips. Main affords and energies in ASML are directed in the research and production of Extreme UltraViolet Photolithography Scanners. This technology consents to fabricate chips with features theoretically down to 5 nm. In this context not only the optical but also the mechanical components play a crucial role in a EUVL scanner. The candidate performed his activity in the Materials and Corrosion research group of ASML. Its recent studies includes the study of coatings characterized principally by low friction and high wear resistance. Among these, coatings of Diamond Like Carbon (DLC) have these properties. Changing in the latter are a consequences of the variation of $sp^2$/$sp^3$ carbon bonds concentration but also of other species like hydrogen and oxygen compounds present at the surface. The activity of the candidate was focused on the study of the surface energy of a particular type of DLC, an hydrogenated amorphous carbon coating. This was exposed to air Atmospheric Plasma Pressure Jet and consequent changes in surface energy values were studied. This is followed by an Enhanced Backscattering Spectroscopy analysis in order to detect variations in oxygen concentration. It was shown an increase of surface energy, in particular of its polar component related to an increase of oxygen content.