Piezoelectric thin films play a crucial role in the modern communication world, as they are the core of radio frequency (RF) filters used in virtually all mobile devices. These components ensure the transmission and reception of signals at specific frequencies. Surface Acoustic Wave resonators (SAW) and Bulk Acoustic Wave (BAW) resonators are the current standard for piezoelectric-based RF filters, with Aluminium Nitride (AlN) being one of the most commonly used material. As mobile network technology advances, RF filters must work at higher frequencies with larger bandwidths, and the devices’ designs and materials must be developed too. In this context, this thesis aims to optimize the sputtering deposition of piezoelectric thin films.