The main objective of this six months internship was to grow TiO2-anatase (001) layers on top of substrates such as strontium titanate, SrTiO3, and study and optimize their structure. Films were grown by Molecular Beam Epitaxy (MBE) deposition technique. This was achieved by optimizing the deposition parameters and conditions. Once the deposition is done, the surface structure is analyzed using the Low Energy Electron Diffraction (LEED), while chemical composition and the presence of contaminants was investigated by Auger Electron Spectroscopy (AES). The experimental set-up allowing to record and analyze quantitative LEED has been implemented only at the end of the internship and it was not possible to record the intensity of LEED diffraction spots versus electron energy.