Design and FEM Simulation of dual mass resonant MEMS Gyroscope
Francesca Pistorio
Design and FEM Simulation of dual mass resonant MEMS Gyroscope.
Rel. Aurelio Soma'. Politecnico di Torino, Corso di laurea magistrale in Ingegneria Meccanica, 2020
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Abstract
With the rapid development of MEMS technology, silicon micromachined gyroscopes have attracted much attention. Based on the working principle, the MEMS gyroscopes are divided into two main categories including resonant and non-resonant gyroscopes. In resonant MEMS gyroscopes, the device is operated at resonance and both the drive and sense mode resonant frequency values are generally matched which leads to high mechanical sensitivity. A major challenge faced by the MEMS designer is the fluctuation in the performance parameters of resonant MEMS gyroscopes as they are easily affected by any variation in ambient conditions and fabrication imperfections, as these imperfections can cause a shift in resonance frequency which in turn causes a mismatch between the drive and sense mode frequencies.
To minimize these effects, complex structures have to be introduced in the design or additional feedback circuitry is required to reduce the mismatch between drive and sense mode frequencies
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