This thesis activity was performed by the candidate at ASML Netherlands B.V. in Veldhoven, the Netherlands. ASML is the world leader supplier of photolithography machines used in the production of computer chips. Main affords and energies in ASML are directed in the research and production of Extreme UltraViolet Photolithography Scanners. This technology consents to fabricate chips with features theoretically down to 5 nm. In this context not only the optical but also the mechanical components play a crucial role in a EUVL scanner. The candidate performed his activity in the Materials and Corrosion research group of ASML. Its recent studies includes the study of coatings characterized principally by low friction and high wear resistance.