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From FinFET to Nanosheet Si-SiGe GAAFET: fabrication process simulation and analysis

Matteo Pelosi

From FinFET to Nanosheet Si-SiGe GAAFET: fabrication process simulation and analysis.

Rel. Gianluca Piccinini, Marco Vacca. Politecnico di Torino, Master of science program in Electronic Engineering, 2021