Politecnico di Torino (logo)

Modeling of The Fatigue Behavior of Micro-Switch

Guiyang Cui

Modeling of The Fatigue Behavior of Micro-Switch.

Rel. Cristiana Delprete, Eugenio Brusa. Politecnico di Torino, Corso di laurea magistrale in Ingegneria Meccanica (Mechanical Engineering), 2021

PDF (Tesi_di_laurea) - Tesi
Licenza: Creative Commons Attribution Non-commercial No Derivatives.

Download (7MB) | Preview

This thesis describes the suspended electrode's fatigue behavior in the RF-MEMS, mainly investigating the effect of temperature on this behavior. Firstly, the suggested materials for the suspended electrode design are listed with their corresponding mechanical properties. Then, the damage mechanism of fatigue of the suspended electrode is discussed, mainly including the two relationships, the one between the temperature and the stress, and the other between the temperature and the fatigue strength. Due to the importance of thermal expansion in the fixed-fixed microstructure, the compressive stress will be the critical point in our study, coupled with the residual stress, bending stress, and stretching stress, thereby predicting the fatigue life of the suspended electrode. Besides, the mechanism for buckling damage will be investigated, as this damage is highly temperature-dependent. Finally, several numerical examples and simulation models will be used to check the conclusion of this study.

Relators: Cristiana Delprete, Eugenio Brusa
Academic year: 2020/21
Publication type: Electronic
Number of Pages: 71
Corso di laurea: Corso di laurea magistrale in Ingegneria Meccanica (Mechanical Engineering)
Classe di laurea: New organization > Master science > LM-33 - MECHANICAL ENGINEERING
Aziende collaboratrici: UNSPECIFIED
URI: http://webthesis.biblio.polito.it/id/eprint/18561
Modify record (reserved for operators) Modify record (reserved for operators)