PZT Process Development for pMUT Actuators
Vincenzo Pasanisi
PZT Process Development for pMUT Actuators.
Rel. Danilo Demarchi, Carlo Ricciardi. Politecnico di Torino, Master of science program in Nanotechnologies For Icts, 2019
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Abstract
The objective of this thesis is the development of a process flow PZT-based of a piezoelectric Micromachined Ultrasound Transducer (pMUT) for large area applications, and subsequently the characterization of the PZT layer and the full device. A brief introduction and a theoretical background is developed in order to have a better understanding of the following experiments. A simple lumped element model is explained and the main process flow is discussed, giving a general idea of the steps. Then, the development of the process is treated, showing some results related to this exotic ferroelectric material, such as the development of a PZT etching process and a Critical Dimension (CD) of 10 um for the patterning of it.
Moreover, the development of a stable Bosch Process Deep Reactive Ion Etching (DRIE) is tackled and the improvements will be discussed in details
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