Micromachanical cantilevers are widely used in frequency-shift-based sensor of mass, force, and manetic field. And these cantilevers are easily miniaturized and allow for integration with electronics. Un- fortunately, we don’t have a fully detailed understanding of their dynamics response at their micro and nano scale. There is a sur- pringly study grown rapidly into the dynamics response in micro and nano cnatilevers, to satisfy the demands of fundamental questions and practical needs. Recently, direct obervation of fano resonance from coupled cantilevers in arrays can greatly decrease the minimum detectable mass, thanks to an average ten-fold increase in Q factor of Fano peaks respect to Lorentzian ones.