In semiconductor industries an important role is given by MEMS sensors. These devices are microscaled sensors that combine mechanical and electronic properties, in order to measure and convert physical quantities to digital data. Their importance stems from the need of modern digital technology to integrate a large number of sensors into portable devices in order to accomplish advanced tasks like human gesture recognition, activity detection and biometrical measures. This leads to a large market demand of scalable and ultra-low consuming devices capable of sensing external information with an utmost accuracy. Because of the increasing complexity and functionalities in modern electronics, latest sensors started integrating the capability of executing advanced algorithms with a sensor hub, allowing for power advantages and system complexity reduction.