Vincenzo Pasanisi
PZT Process Development for pMUT Actuators.
Rel. Danilo Demarchi, Carlo Ricciardi. Politecnico di Torino, Corso di laurea magistrale in Nanotechnologies For Icts (Nanotecnologie Per Le Ict), 2019
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Abstract
The objective of this thesis is the development of a process flow PZT-based of a piezoelectric Micromachined Ultrasound Transducer (pMUT) for large area applications, and subsequently the characterization of the PZT layer and the full device. A brief introduction and a theoretical background is developed in order to have a better understanding of the following experiments. A simple lumped element model is explained and the main process flow is discussed, giving a general idea of the steps. Then, the development of the process is treated, showing some results related to this exotic ferroelectric material, such as the development of a PZT etching process and a Critical Dimension (CD) of 10 um for the patterning of it.
Moreover, the development of a stable Bosch Process Deep Reactive Ion Etching (DRIE) is tackled and the improvements will be discussed in details
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